Waferpedia

Comparison ledger

0 500versusSPX

Blue M 0 500, Blue M SPX, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
SPXBlue M
OEMBlue MBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Blue M SPX
Specifications
ManufacturerBlue M[1]—
Model0 500[1]—
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]—
Temperature range—ambient to 350°C[2]
Temperature uniformity—+/- 1% of setpoint[2]
Control accuracy—+/-0.5°C[2]
Resolution—+/-0.1°C[2]
Heating power—9 kW[2]
External dimensions—1000 x 1250 x 2850 mm high[2]
Insulation—100 mm fiberglass insulation[2]
Door seal—Blue M silicone door seal[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]michaelbenaltinc.commichaelbenaltinc.com