Comparison ledger
Axcelis RapidStrip 210 ES, Oxford Instruments 100 ICP Fluorine, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RapidStrip 210 ESAxcelis | 100 ICP FluorineOxford Instruments |
|---|---|---|
| OEM | Axcelis | Oxford Instruments |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2007 Date of manufacture | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis RapidStrip 210 ES | Oxford Instruments 100 ICP Fluorine |
| Specifications | ||
| Part Number | 1080-6037[1] | — |
| Software Version | 1.8.7.0.06[1] | — |
| Configuration | System On-Line[1] | — |
| System Type | RapidStrip 210 ES[1] | — |
| Number of Cassettes | 2[1] | — |
| Load Type | Standard[1] | — |
| Install Type | Through-the-Wall[1] | — |
| Robot Type | Brooks[1] | — |
| Endpoint Detection Type | Monochromator[1] | — |
| Throttle Valve | MKS[1] | — |
| Foreline Valve | VAT[1] | — |
| Manufacturer | Matrix[1] | — |
| Model | 3kW switchmode powergen[1] | — |
| OEM | Axcelis[1] | — |
| Category | Etch[2] | — |
| Wafer size | 8 inch[1] | 4 inch, 6 inch, 8 inch (with clamp change)[4] |
| Cooling station | Present[1] | — |
| SECS/GEMS | Yes[1] | — |
| Ozone / microwave generator manufacturer | Matrix[1] | — |
| Ozone / microwave generator model | 3kW switchmode powergen[1] | — |
| Pump | IQDP 80[1] | — |
| Mechanical booster | QMB1200[1] | — |
| System status | System on-line[1] | — |
| CE mark | Certified[1] | — |
| Can produce wafers as-is | Yes[1] | — |
| All cables present | Yes[1] | — |
| System On-Line | Yes[1] | — |
| CE Mark Certified | Yes[1] | — |
| Cooling Station | Yes[1] | — |
| Date of Manufacture | 2007-12-31[3] | — |
| Etch Gases | — | SF6, CF4, O2, Ar, N2, CHF3, C4F8[4] |
| Cryo DRIE etch rate | — | up to 5 µm/min[4] |
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