Comparison ledger
Axcelis NV 6200, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 6200Axcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 6200 | Varian 160 XP Ion |
| Cited variants |
| — |
| Specifications | ||
| Manufacturer | Axcelis[2] | — |
| Model | NV 6200[2] | 160 XP Ion[5] |
| Category | Ion Implantation[3] | Ion Implantation[4] |
| Equipment type | Ion implanter[2] | — |
| Wafer size | 6 inch[2] | — |
| Configuration | — | 150mm High Current IMP[4] |
| OEM | — | Varian[5] |
| Tool type | — | ion implanter[4] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →