Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, Tegal Plasmaline 411, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Plasmaline 411Tegal | |
|---|---|---|
| OEM | Axcelis | Tegal |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tegal Plasmaline 411 |
| Specifications | ||
| Configuration | 14 Amps[1] | — |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| manufacturer | — | Tegal[3] |
| model | — | Plasmaline 411[3] |
| equipment type | — | Plasma asher[3] |
| listed descriptions | — | Asher; plasma oven; AR O2 etcher[3] |
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