Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, SUSS MicroTec Delta 80 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Delta 80 SpinSUSS MicroTec | |
|---|---|---|
| OEM | Axcelis | SUSS MicroTec |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SUSS MicroTec Delta |
| Specifications | ||
| Configuration | 14 Amps[1] | Software is not included[3] |
| Voltage | 380 V[1] | 400 V, 50 Hz[3] |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | 3 Phase + N + PE[3] |
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