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200 PCU Photoresist StabilizerversusGasonics Aura 3010

Axcelis 200 PCU Photoresist Stabilizer, Lam Research Gasonics Aura 3010, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCU Photoresist StabilizerAxcelis
Gasonics Aura 3010Lam Research
OEMAxcelisLam Research
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200Lam Research Gasonics Aura
Specifications
Configuration14 Amps[1]Parts machine[3]
Voltage380 V[1]—
Frequency50 Hz[1]—
Phase3 Phase[1]—
Equipment type—Asher[5]
Wafer size—6 inch[5]
Condition—Parts machine[3]
Make—Lam / Novellus / Gasonics[3]
Model—Aura 3010[3]
Type—Asher[3]
Wafer Sizes—6 inch[5]
Product description—Parts machine[3]
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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing