Comparison ledger
ASML XT 1250 D, Nikon 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | XT 1250 DASML | 1505 G 6 ENikon |
|---|---|---|
| OEM | ASML | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1988– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML XT 1250 D | Nikon 1505 |
| Specifications | ||
| Configuration | ArF[1] | 5" reticle[4] |
| Manufacturer | ASML[2] | — |
| Model | XT 1250 D[2] | 1505 G 6 E[4] |
| Category | Lithography[1] | Stepper[4] |
| Wafer size | 6 inch[3] | — |
| Light source | Cymer XLA165[3] | — |
| Wafer stage | Dual chuck[3] | — |
| Wafer configuration | Dry[3] | — |
| Carrier handler type | Mark I 300 FOUP[3] | — |
| Reticle stage measurement system | Heidenhain encoders[3] | — |
| Resolution | — | 650 nm[5] |
| Numerical Aperture | — | 0.54[5] |
| Reduction | — | 5x[5] |
| Exposure Field | — | 15 x 15 mm[5] |
| Alignment Accuracy | — | 130 nm[5] |
| Wafer Size | — | 4 inch[4] |
| Light Source | — | g-line[6] |
| Introduction Year | — | 1988[5] |
| NA (Numerical Aperture) | — | 0.54[5] |
| Make | — | Nikon[4] |
| Wafer Sizes | — | 4 inch[4] |
| Exposure type | — | g-line[5] |
| NA | — | 0.54[5] |
| Exposure field | — | 9.3 x 18.8 mm[5] |
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