Waferpedia

Comparison ledger

SERV.470.54502versus11600 SRD

ASML SERV.470.54502, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMASMLSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASML SERV.470.54502Semitool 11600 SRD
Specifications
ConfigurationASML sealed cleanroom part[1]Ceramic[2]
Part TypeSealed cleanroom part / OIU Trackball Assembly[1]—
Vintage2019[1]—
ConditionNew stock, open in cleanroom only[1]—
Manufacturer—Semitool[2]
Model—11600 SRD[2]
Equipment type—Spin Rinse Dryer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing