Waferpedia

Comparison ledger

Mirraversus1 DP 41

Applied Materials Mirra, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MirraApplied Materials
1 DP 41Logitech
OEMApplied MaterialsLogitech
CategoryCMPCMP
Wafer sizePlaten3 - Wafer Buff—
Process node——
Introduced——
Production run2000–—
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials MirraLogitech 1 DP 41
Cited variants
  • Applied Materials Mirra CMP[1]
  • Mirra[1]
  • Tungsten[1]
  • Dielectric[2]
—
Specifications
SoftwareMP2B6.2_28[1]—
Configuration3 Polish Platens:[1]50/60 Hz[4]
Wafer sizePlaten3 - Wafer Buff[1]—
OEMApplied Materials[1]—
ModelMirra[1]1 DP 41[4]
Equipment typeCMP (Chemical Mechanical Polisher)[1]—
Polish platens3[1]—
Platen 1STD polish[1]—
Platen 2STD polish[1]—
Platen 3Wafer Buff[1]—
Polish heads4[1]—
Flow controllersEntegris[1]—
Robot armApplied Materials[1]—
Vintage1999[1]—
Phase—3 Phase[4]
Voltage—480 V[4]
Make—Logitech[4]
Frequency—50/60 Hz[4]
Current—12 amps[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing