Waferpedia

Comparison ledger

5500 100 Dversus017-0146-01 Prealigner

Applied Materials 5500 100 D, Brooks 017-0146-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
5500 100 DApplied Materials
OEMApplied MaterialsBrooks
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 5500 100 DBrooks 017-0146-01 Prealigner
Specifications
equipmentTypeStepper / Scanner[1]—
categoryLithography[2]—
vintageYear1996[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com