Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, YES 58 TA HMDS Vacuum Bake Vapor Prime, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | YES 58 |
| Specifications | ||
| Temperature | — | PID temperature controller, 25–200 °C with front panel readout[1] |
| Configuration | — | Chamber zone controlled for greater temperature uniformity[1] |
| Unit | — | 73.66 cm W × 62.23 cm D × 88.27 cm H (29″ × 24.5″ × 34.75″)[1] |
| Chamber | — | 40.64 cm W × 45.72 cm D × 40.64 cm H (16″ × 18″ × 16″)[1] |
| Capacity | — | 8 cassettes of 125 mm or 150 mm wafers ; 12 cassettes of 100 mm wafers[1] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →