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0242-36515 RTP XE Chamber Temperature Match KitversusAlpha 303 i K

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Tokyo Electron Alpha 303 i K, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0242-36515 RTP XE Chamber Temperature Match KitApplied Materials
Alpha 303 i KTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tokyo Electron Alpha 303
Cited variants—
  • Alpha 303 i K Furnace, 12" MTO[1]
  • Alpha 303 i K Furnace, 12" DCS-MTO[2]
  • Alpha 303 i K MTO[1]
  • Alpha 303 i K DCS-MTO[2]
Specifications
Configuration—MTO[1]
Software Version—V 2.13 Rev.004[3]
CIM—SECS[4]
Process—MOL[4]
Factory Interface—FOUP[3]
Handler System—Loadport (2)[3]
Category—Thermal / Diffusion[3]
Wafer size—12 inch[1]
Tool type—Furnace[3]
CIM SECS—Supported[3]
Configuration options—MTO, DCS-MTO[3]
Vintage (MTO)—2002[1]
Vintage (DCS-MTO)—2009[2]
Handler system—2 Handler System Loadport (2)[3]
0242-36515 RTP XE Chamber Temperature Match Kit entryAlpha 303 i K entryAsk about these tools →Share experience with this comparison →

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing