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0242-36515 RTP XE Chamber Temperature Match KitversusSE 600 13 13 Temperature

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Thermotron SE 600 13 13 Temperature, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Thermotron SE 600 13 13 Temperature
Specifications
Workspace Volume—20.7 ft³[1]
Configuration—586 L[1]
Temperature Uniformity—±0.5ºC (±0.9ºF)[1]
Temperature Range—-70ºC to 180ºC[1]
Temperature Control Tolerance—0.3°C (0.5°F)[1]
Make—Thermotron[1]
Model—SE 600 13 13[1]
Asset #—151681[1]
Workspace volume—20.7 ft³ (586 L)[1]
Temperature range—-70ºC to 180ºC (-94ºF to 356ºF)[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing