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0242-36515 RTP XE Chamber Temperature Match KitversusHerareus UT 6120 Drying

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Thermo Fisher Herareus UT 6120 Drying, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermo Fisher
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Thermo Fisher Herareus UT 6120 Drying
Specifications
Tool type—Drying Oven[1]
Make—Thermo Scientific / Herareus[1]
Model—UT 6120[1]
Manufacturer—Thermo Fisher[2]
Category—Thermal / Diffusion[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com