Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusHeavy Duty Tube

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Lindberg Heavy Duty Tube, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsLindberg
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lindberg Heavy Duty Tube
Specifications
Product type—Tube furnace[1]
Category—Heat Treating[2]
Model number—54251-A[2]
Serial number—10932[2]
Capacity—3 inch diameter[2]
Maximum temperature—1500°C[3]
Configurations—Single-zone and three-zone models[3]
Orientation—Maximum vertical orientation available[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]hgrinc.comhgrinc.com
  3. [3]lindbergmph.comlindbergmph.com