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0242-36515 RTP XE Chamber Temperature Match KitversusPCO2-14

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Despatch PCO2-14, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PCO2-14Despatch
OEMApplied MaterialsDespatch
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Despatch PCO2-14
Specifications
Heating—Electrically heated[1]
Designed use—Hard baking polyimide coatings[1]
Atmosphere—Inert atmosphere[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org