Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Cascade Microtech TFO-10, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | TFO-10Cascade Microtech |
|---|---|---|
| OEM | Applied Materials | Cascade Microtech |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Cascade Microtech TFO-10 |
| Specifications | ||
| Capacity | — | 10.6 cu.ft. (300 liters)[1] |
| Interior Dimensions (W x D x H) | — | 29.8 x 20.6 x 30.0 inches (757 x 524 x 762 mm)[1] |
| Exterior Dimensions (W x D x H) | — | 44.1 x 29.9 x 56.8 inches (1121 x 760 x 1442 mm)[1] |
| Unit Weight | — | 357 lb (162.8 kg)[1] |
| Shipping Weight | — | 449 lb (204 kg)[1] |
| Shelves | — | 3 standard, 8 maximum[1] |
| Access Port | — | 3 inches[1] |
| Warranty | — | 2-Year Limited Warranty[1] |
| Electrical | — | 220V-240V, 50/60Hz, 1 phase, 26 amps[2] |
| Temperature Range | — | 15°C above ambient to 306°C[1] |
| Heat-Up Time to 150°C | — | 14 minutes (from ambient 25°C)[2] |
| Recovery Time after 30 sec Door Opening at 150°C | — | 3 minutes[1] |
| Temperature Uniformity at 150°C | — | 2.5°C[1] |
| Flow Rate | — | 51 CFM[1] |
| Safety Certifications | — | TÜV SÜD America: Canada CSA 61010-1, USA UL 61010-1, EU EN 61010-1, CE[1] |
| Temperature Uniformity at 80°C | — | 1.5°C[2] |
| Temperature Uniformity at 306°C | — | 5.5°C[2] |
| Temperature Stability at 80°C | — | ±0.2°C[2] |
| Temperature Stability at 150°C | — | ±0.3°C[2] |
| Temperature Stability at 306°C | — | ±0.4°C[2] |
| Heat-Up Time to 80°C | — | 6 minutes (from ambient 25°C)[2] |
| Heat-Up Time to 306°C | — | 31 minutes (from ambient 25°C)[2] |
| Recovery Time after 30 sec Door Opening at 80°C | — | 3 minutes[2] |
| Recovery Time after 30 sec Door Opening at 306°C | — | 6 minutes[2] |
| Recovery Time after 60 sec Door Opening at 150°C | — | 6 minutes[2] |
| Shelf Capacity per Shelf | — | 75 lb (34 kg)[2] |
| Shelf Capacity Total | — | 225 lb (102 kg)[2] |
| Air Flow Across Shelf Space | — | 144 linear feet per minute (43.9 meters per minute)[2] |
| Air Changes per Hour at 80°C | — | 304[2] |
| Model | — | TFO-10[3] |
| Type | — | forced air-drying oven[1] |
| Interior dimensions | — | 29.8 x 20.6 x 30.0 in (757 x 524 x 762 mm)[1] |
| Exterior dimensions | — | 44.1 x 29.9 x 56.8 in (1121 x 760 x 1442 mm)[1] |
| Access port | — | 3 in[1] |
| Voltage | — | 220V-240V[1] |
| Phase | — | 1Ø[1] |
| Frequency | — | 50/60Hz[1] |
| Amperage | — | 26 A[1] |
| Temperature range | — | ambient +15°C to 306°C[1] |
| Heat-up time to 80°C from ambient (25°C) | — | 6 minutes[2] |
| Heat-up time to 150°C from ambient (25°C) | — | 14 minutes[2] |
| Heat-up time to 306°C from ambient (25°C) | — | 31 minutes[2] |
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