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0242-36515 RTP XE Chamber Temperature Match KitversusPyramax 100 N

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, BTU Pyramax 100 N, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBTU
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run—2007–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—BTU Pyramax 100
Specifications
Configuration—Nitrogen[1]
Phase—3 Phase[1]
Max Temp—400*C[1]
Equipment type—Reflow oven[2]
Atmosphere—Nitrogen[3]
Power—3-phase[1]
Power frequency—50/60 Hz[1]
Maximum temperature—400°C[1]
Heated zones—8 heated zones[3]
Heated zones arrangement—8 top & 8 bottom zones[3]
Total length—4.648 mm[3]
Heating length—2.540 mm[3]
Cooling length—711 mm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]core-emt.comcore-emt.com