Waferpedia

Comparison ledger

0041-39086 ESC PartversusRainbow 9600 SE II TCP

Applied Materials 0041-39086 ESC Part, Lam Research Rainbow 9600 SE II TCP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research Rainbow
Specifications
Configuration—With DSQ[1]
Wafer Type—Flat[1]
Vlave Type—VAT Pendulum Valve 65 Series[1]
SMIF—No[1]
Bulkhead—Wall Facia are Missing[1]
Monochromator Endpoint—Dual Endpoint Detector - Lam # 853 001983 110[1]
Software—E 2.0.1-044[1]
RF—3X on Board Trumpf Generators (Top, Bias, DSQ)[1]
Cart—No[1]
Robot Type—Harmonic Drive[1]
Loader Type—Hine Indexers 38 A[1]
Turbo Pumps—Alcatel ATH 1300 MT[1]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing