Waferpedia

Comparison ledger

0041-39086 ESC PartversusRainbow 4526 I

Applied Materials 0041-39086 ESC Part, Lam Research Rainbow 4526 I, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Rainbow 4526 ILam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research Rainbow 4526
Specifications
Configuration—Classic[1]
Equipment type—Dry Etcher[2]
Model—Rainbow 4526 I / Rainbow 4526i Classic[2]
Wafer size—6 inch[1]
Wafer size version—150 mm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]fabsurplus.comfabsurplus.com