Comparison ledger
Applied Materials 0021 32427 Part, YES 253B-60-2-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0021 32427 PartApplied Materials | 253B-60-2-2YES |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0021 32427 Part | YES 253B-60-2-2 |
| Specifications | ||
| Configuration | Cooling Plare, Countermatch,300mm Produc[1] | — |
| Type | — | MKS Type 253B Exhaust Throttle Valve[2] |
| Valve style | — | butterfly valve[2] |
| Function | — | regulate removal of gas from a vacuum chamber; sealing-valve versions can shut off the removal of gas[2] |
| Controller compatibility | — | Type 651, 652, 152G, or 252 (revision D or later) controllers[2] |
| Flange type | — | ASA[2] |
| Mounting flange | — | ASA 2 inch[2] |
| Inside diameter | — | 2.362 in (60.0 mm)[2] |
| Outside diameter | — | 5.95 in (151 mm)[2] |
| Thickness | — | 0.75 in (19.1 mm)[2] |
| Bolt hole diameter | — | 0.75 in (19.1 mm)[2] |
| No. of bolt holes | — | 4[2] |
| Overall height | — | 10.79 in (274.1 mm)[2] |
| Closed leakage | — | <10^-7 Torr l/sec[2] |
| Flapper seal | — | Viton[2] |
| Valve body operating temperature | — | 0° to 90° C (32° to 194° F) max.[2] |
| Valve motor ambient operating temperature | — | 0° to 70° C (32° to 158° F) max.[2] |
| Speed (open to close) | — | Standard: 7.5 sec; Optional: < 2 sec[2] |
| Resolution | — | Standard: 1/10,000; Fast motor option: 1/2800[2] |
| Power input | — | ±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[2] |
| Electrical connector | — | 15-Pin Type "D" connector[2] |
| Pin count | — | 15-pin[2] |
| Cable length | — | 6 in pigtail cable[2] |
| Controller connection | — | Type 651, 652, 152G, or 252D/252E controllers via listed interface cables[2] |
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