Waferpedia

Comparison ledger

0020 23839 PartversusSRH 420 MC Backside

Applied Materials 0020 23839 Part, Ulvac SRH 420 MC Backside, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OEMApplied MaterialsUlvac
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartUlvac SRH 420 MC Backside
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]—
Type—Backside Sputter[2]
Wafer size—6 inch[2]
Vintage—2005[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing