Waferpedia

Comparison ledger

0020 18698 PartversusTurboDisc K 465 MOCVD

Applied Materials 0020 18698 Part, Veeco TurboDisc K 465 MOCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
OEMApplied MaterialsVeeco
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartVeeco TurboDisc K 465
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]K465 GaN Turbo disk[2]
Phase—3 Phase, - 5 Wire[2]
Voltage—400 Vac, 280 A, 50/60 Hz[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing