Waferpedia

Comparison ledger

0020 18455 PartversusCC2

Applied Materials 0020 18455 Part, Varian CC2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
CC2Varian
OEMApplied MaterialsVarian
CategoryDepositionDeposition
Wafer size—6"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartVarian CC2
Cited variants—
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[2]—
manual listed—Varian CC2 Manual[3]
film deposition type—sputter deposition of metals, alloys, and insulating thin films[3]
stage diameter—6" diameter stage[3]
co-sputter capability—co sputter capable[3]
reactive sputtering—available (Nitrogen or Oxygen)[3]
Model—CC2 (senTorr CC2)[3]
Part Number—L91213020000[1]
OEM—Varian[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]ebay.comebay.com
  2. [2]inventory listing
  3. [3]nanofab.utah.edunanofab.utah.edu