Waferpedia

Comparison ledger

0020 18455 PartversusSyrus Pro 1510

Applied Materials 0020 18455 Part, Leybold Syrus Pro 1510, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
OEMApplied MaterialsLeybold
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartLeybold Syrus
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]Dual APS planetary[2]
Used with standard dielectric materials—Titanium, Niobium, Tantalum, Silicon dioxide[2]
Dielectric materials—Titanium, Niobium, Tantalum, Silicon dioxide[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing