Waferpedia

Comparison ledger

0020 18455 PartversusGasonics Inova

Applied Materials 0020 18455 Part, Lam Research Gasonics Inova, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
Gasonics InovaLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartLam Research Gasonics Inova
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]—
Equipment type—PVD (Physical Vapor Deposition)[2]
Wafer size—8 inch[2]
Vintage—1999[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing