Waferpedia

Comparison ledger

0010 47763versus2300 Selis

Applied Materials 0010 47763, Lam Research 2300 Selis, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
2300 SelisLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010 47763Lam Research 2300 Selis
Cited variants—
  • 2300 SELIS - Chamber Only[1]
Specifications
Configuration2nd Source New[2]Chamber Only[1]
TypeMonopolar Dual Heated[3]—
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[4]—
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[3]—
Model0010-47763[2]2300 Selis[5]
OEMApplied Materials[2]—
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[3]—
Quantity available (source)1[3]—
OEM / manufacturer—Lam Research[5]
Equipment type—Etch chamber[5]
Category—Etch[6]
Wafer size—12 inch[5]
Process / description—Dielectric Etch – Process Chamber[1]
Version—300 mm[1]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]inventory listing
  3. [3]saulcontrol.comsaulcontrol.com
  4. [4]getspares.comgetspares.com
  5. [5]Equipment inventory listing
  6. [6]waferpedia.comwaferpedia.com