Comparison ledger
Applied Materials 0010 47763, Axcelis RapidStrip 210 ES, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | RapidStrip 210 ESAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2007 Date of manufacture |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Axcelis RapidStrip 210 ES |
| Specifications | ||
| Configuration | 2nd Source New[1] | System On-Line[4] |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | 3kW switchmode powergen[4] |
| OEM | Applied Materials[1] | Axcelis[4] |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Part Number | — | 1080-6037[4] |
| Software Version | — | 1.8.7.0.06[4] |
| System Type | — | RapidStrip 210 ES[4] |
| Number of Cassettes | — | 2[4] |
| Load Type | — | Standard[4] |
| Install Type | — | Through-the-Wall[4] |
| Robot Type | — | Brooks[4] |
| Endpoint Detection Type | — | Monochromator[4] |
| Throttle Valve | — | MKS[4] |
| Foreline Valve | — | VAT[4] |
| Manufacturer | — | Matrix[4] |
| Category | — | Etch[5] |
| Wafer size | — | 8 inch[4] |
| Cooling station | — | Present[4] |
| SECS/GEMS | — | Yes[4] |
| Ozone / microwave generator manufacturer | — | Matrix[4] |
| Ozone / microwave generator model | — | 3kW switchmode powergen[4] |
| Pump | — | IQDP 80[4] |
| Mechanical booster | — | QMB1200[4] |
| System status | — | System on-line[4] |
| CE mark | — | Certified[4] |
| Can produce wafers as-is | — | Yes[4] |
| All cables present | — | Yes[4] |
| System On-Line | — | Yes[4] |
| CE Mark Certified | — | Yes[4] |
| Cooling Station | — | Yes[4] |
| Date of Manufacture | — | 2007-12-31[6] |
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