Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusSM 32 C Temperature Humidity

Applied Materials 0010-22161 High EFF RF Match, Thermotron SM 32 C Temperature Humidity, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchThermotron SM 32 C Temperature Humidity
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Chamber 1[3]
Temperature Range—-70 to +170 Deg. C –[3]
Power—208V, 3Ph, 48.2 Amps[3]
Interior dimensions (W x D x H)—38"W x 38"D x 38"H[3]
Exterior dimensions (W x D x H)—58"W x 64"D x 88"H[3]
Cooling—Air Cooled[3]
Humidity range—20% to 95%[3]
Purge—GN2 Purge[3]
Controller—Thermotron Model 8200 Touchscreen Control[3]
Refrigerants—Environmentally Friendly Refrigerants[3]
Interior—Stainless Steel Interior[3]
Features—Viewing Window, Interior Light, Castors, 1 Shelf[3]
Feed-thru ports—2x 3.75" Opposing Side Feed-Thru Ports[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing