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0010-22161 High EFF RF MatchversusSE 600 15 15 Temperature

Applied Materials 0010-22161 High EFF RF Match, Thermotron SE 600 15 15 Temperature, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchThermotron SE 600 15 15 Temperature
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]SE-600-15-15[4]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Workspace Dimensions (W x D x H)—40 x 26.25 x 34 inches (102 x 67 x 86 cm)[3]
Workspace Volume—20.7 ft³ (586 L)[3]
Temperature Range—-70°C to 180°C (-94°F to 356°F)[3]
Temperature Uniformity—±0.5°C (±0.9°F)[3]
Temperature Control Tolerance—0.3°C (0.5°F)[3]
Humidity Range—10% to 98% RH[3]
Humidity Control—±2.5% RH[3]
Heating Performance (rate -65° to 71°C)—19°C per minute[4]
Cooling Performance (rate 71° to -65°C)—10.4°C per minute[4]
Heating Performance in Minutes (-65° to 71°C)—11 minutes[3]
Heating Performance in °C/Minute (-65° to 71°C)—19.4°C[3]
Cooling Performance in Minutes (71° to -65°C)—22 minutes[3]
Cooling Performance in °C/Minute (71° to -65°C)—10.4°C[3]
Electrical Requirements—460V, 3PH, 70 Amps[4]
Approx. Shipping Weight—2,115 lbs (959 kg)[3]
Move-In Dimensions (W x D x H)—49 x 70 x 83 inches (124 x 178 x 211 cm)[3]
Type—Temperature chamber[5]
Interior dimensions—40 in W x 26 in D x 34 in H[4]
Outer dimensions—49 in W x 70 in D x 83 in H[4]
Temperature range—-70 to +180 °C[4]
Power—460 V, 3 PH, 70 A[4]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]lre.comlre.com
  4. [4]lre.comlre.com
  5. [5]Equipment inventory listing