Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Pfeiffer Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | Turbomolecular VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Pfeiffer Turbomolecular Vacuum |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[2] | Pfeiffer[4] |
| Model | 0010-22161[2] | -[4] |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Turbo Pump | — | Pfeiffer TMU 071 P[4] |
| Turbo Controller | — | Pfeiffer TC 600[4] |
| Cooling Module | — | Pfeiffer PM Z01 253[4] |
| Power Supply Base | — | Balzers PCU 0200[4] |
| Asset # | — | 145390[4] |
| Type | — | Turbomolecular vacuum pump system[4] |
| Bearing system | — | Hybrid bearing (ball and permanent magnetic bearing)[1] |
| Number of stages | — | Multiple stages[1] |
| Vacuum level | — | High and ultra-high vacuum[1] |
| Mounting position | — | Any mounting position[1] |
| Bearing type | — | Hybrid bearing system (ball and permanent magnetic bearing)[1] |
| Design | — | Multi-stage with rotor stacks[1] |