Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Pfeiffer Duo 3 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | Duo 3 VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Pfeiffer Duo 3 Vacuum |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | Duo 3[6] |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Pump type | — | Rotary vane pump[4] |
| Construction | — | Oil-sealed rotational displacement pump[4] |
| Stage | — | Dual-stage[5] |
| Variants | — | Duo 3 standard version, Duo 3 M, Duo 3 MC[1] |
| Duo 3 M difference | — | Magnetic coupling[1] |
| Duo 3 MC differences | — | Operating fluid F4; magnetic coupling encapsulated on the pump side; vane material changed; hose connection on the gas ballast valve; leakage rate ≤ 1 × 10-8 Pa m3/s[1] |
| Gas ballast / safety valve | — | Integrated gas ballast and safety valve[5] |
| Pumping speed at 50 Hz | — | 2.5 m3/h[5] |
| Pumping speed at 60 Hz | — | 2.9 m3/h[5] |
| Ultimate pressure with gas ballast | — | 3 × 10-3 hPa[5] |
| Ultimate pressure without gas ballast | — | 3 × 10-3 hPa[5] |
| Exhaust pressure, max. | — | 1,500 hPa[5] |
| Rotation speed at 50 Hz | — | 3,000 rpm[5] |
| Rotation speed at 60 Hz | — | 3,600 rpm[5] |
| Cooling method | — | Air[5] |
| Motor version | — | 1-ph motor[5] |
| Ambient temperature | — | 12-40 °C[5] |
| Emission sound pressure level without gas ballast at 50 Hz | — | 53 dB(A)[5] |
| Mains requirement voltage 50 Hz | — | 230-240 V[5] |
| Mains requirement voltage 60 Hz | — | 230-240 V[5] |
| Recommended mains fuse capacity | — | 4 A[5] |
| Operating fluid | — | P3[5] |
| Operating fluid filling | — | 0.4 l[5] |
| Leak rate safety valve | — | 1 × 10-5 Pa m3/s[5] |
| Dimensions | — | 309 x 129 x 222 mm[5] |
| Rated power 50 Hz | — | 0.15 kW[5] |
| Rated power 60 Hz | — | 0.18 kW[5] |
| Protection category | — | IP40[5] |
| Weight | — | 11.3 kg[5] |
| Manufacturer | — | Pfeiffer[6] |
| Pump construction | — | Oil-sealed[1] |
| Stages | — | Two-stage[1] |
| Application range | — | Coarse and medium vacuum[1] |
| Variants stated | — | Standard version, M version, MC version[1] |
| MC version changes | — | Operating fluid F4, magnetic coupling encapsulated on the pump side, changed vane material, hose connection on the gas ballast valve, leakage rate ≤ 1 × 10-8 Pa m3/s[1] |