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0010-22161 High EFF RF MatchversusAlcatel ADP 122 P Dry

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer Alcatel ADP 122 P Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer Alcatel ADP 122
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Voltage—200 V ~ 208 V[3]
Peak Pumping Speed—95 m³/h (50 Hz), 112 m³/h (60 Hz)[4]
Ultimate Pressure—3.0×10⁻² mbar (50 Hz), 1.5×10⁻² mbar (60 Hz)[4]
Water Cooling Flow—1.5 L/h[4]
Power Supply Voltages—200, 240, 380, 415 V (50 Hz); 200, 240, 380, 480 V (60 Hz)[4]
Inlet Port—NW 50[4]
Exhaust Port—NW 40[4]
Weight—400 lbs[4]
Width (Series 2)—390 mm[5]
Voltage (specific configuration)—200–208 V[3]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]ajvs.comajvs.com
  5. [5]ajvs.comajvs.com