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0010-22161 High EFF RF MatchversusTrivac D 8 B Rotary Vacuum

Applied Materials 0010-22161 High EFF RF Match, Leybold Trivac D 8 B Rotary Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsLeybold
Category——
Wafer size——
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FamilyApplied Materials 0010-22161 High EFF RF MatchLeybold Trivac
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Two Stage, Oil Sealed Pump[3]
Volume Flow Rate—8[3]
Pressure Limit—< 1x10 -4[3]
Type—Two-stage, oil-sealed rotary vacuum pump[3]
Volume Flow Rate (as stated)—8[3]
Pressure Limit (as stated)—< 1 x 10-4[3]
Ultimate Pressure—≤ 2 x 10-3 mbar (≤ 1.5 x 10-3 torr)[4]
Pumping Speed—10.2 m³/h (6 cfm)[4]
Motor Voltage—3-phase 50/60Hz; 1-phase 50/60Hz; Dual Voltage[4]
SKU—11256[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]shop.leyboldus.comshop.leyboldus.com