Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Lam Research SEZ RST 201, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | SEZ RST 201Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1997– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Lam Research SEZ |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | RST 201[3] |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Configuration | — | Single Cleaning[3] |
| Manufacturer | — | Lam / SEZ[3] |
| Wafer Sizes | — | 8 inch[3] |
| Tool type | — | single cleaning tool[3] |
| Process type | — | single-wafer wet chemical processor[4] |
| Process chamber count | — | single process chamber[4] |
| Load ports | — | two open-cassette load ports[4] |