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0010-22161 High EFF RF MatchversusSEZ 102

Applied Materials 0010-22161 High EFF RF Match, Lam Research SEZ 102, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SEZ 102Lam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
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FamilyApplied Materials 0010-22161 High EFF RF MatchLam Research SEZ
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]102[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Voltage—208 Vac[3]
Phase—3 Phase[3]
Configuration—50 A[3]
Manufacturer—Lam Research[4]
Wafer Size—6 inch[3]
Frequency—50/60 Hz[3]
Current—50 A[3]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com