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0010-22161 High EFF RF MatchversusRS 55 TCA Resistivity Mapper

Applied Materials 0010-22161 High EFF RF Match, KLA RS 55 TCA Resistivity Mapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchKLA RS 55 TCA Resistivity Mapper
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]RS 55 TCA[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Manufacturer—KLA[3]
Wafer size—8 inch[3]
Robot type—KLA H2D[4]
Software version—ST-6.50[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]waferpedia.comwaferpedia.com