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0010-22161 High EFF RF MatchversusRS 100 Sheet Resistance Measurement

Applied Materials 0010-22161 High EFF RF Match, KLA RS 100 Sheet Resistance Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
Category——
Wafer size——
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FamilyApplied Materials 0010-22161 High EFF RF MatchKLA RS 100
Specifications
MakeApplied Materials[1]KLA[4]
Model0010-22161[1]RS 100[4]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Refurbished[3]
Equipment name—KLA RS 100 Sheet Resistance Measurement System[4]
Wafer sizes—4 inch, 6 inch, 8 inch, 12 inch[3]
300 mm wafer manufacturing—Designed to meet production requirements for 300 mm wafer manufacturing[5]
Temperature compensation—Film-specific TCR correction for temperature variations during wafer measurement[5]
Edge performance—Measurement information up to 1 mm from the conductive film edge[5]
Control software—Windows NT[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]datasheet.datasheetarchive.comdatasheet.datasheetarchive.com