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0010-22161 High EFF RF MatchversusArcher 10

Applied Materials 0010-22161 High EFF RF Match, KLA Archer 10, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchKLA Archer 10
Cited variants—
  • Archer 10 XT Overlay[1]
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]Archer 10[5]
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Wafer Size—200mm[4]
Wafer Handling—200mm dual open wafer handler[4]
Measurement Technology—Coherence probe interference microscope[4]
Software—Windows NT based[4]
Integration Software—KLA Stepper Setup (KLASS) station integration software[4]
User Interface—19-inch LCD screen[4]
Network—Network ready[4]
OEM—KLA[5]
Category—Metrology & Inspection[1]
Wafer handling—200mm dual port open wafer handler[1]
Overlay measurement module—Fully automated overlay measurement module[4]
Optics—Coherence probe interference microscope[4]
Computer software—Windows NT based software and user interface[4]
Computer interface—Integrated user interface[4]
Display—19" LCD screen[4]
Storage media—3.5 inch floppy drive and CD ROM drive[4]
Connectivity—Network ready[4]
Communications—SEC's communication[4]
Software version—5.6[1]
Computer upgrade—XP computer upgrade[1]
Computer—KLASS RS2 computer[1]
Configuration options—AMS, Digitizer, LINNIK, PDA, PZT-P-Z feedback[1]
Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]classoneequipment.comclassoneequipment.com
  5. [5]Equipment inventory listing