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0010-22161 High EFF RF MatchversusETC 200 L Thermal

Applied Materials 0010-22161 High EFF RF Match, ESPEC ETC 200 L Thermal, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsESPEC
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
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Control system——
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FamilyApplied Materials 0010-22161 High EFF RF MatchESPEC ETC 200 L Thermal
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]ETC 200 L[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Manufacturer—ESPEC[3]
Model number—ETC-200L[4]
Category—Temperature chamber[4]
Temperature range—-65 to +200 °C[4]
Control accuracy—±0.1 °C[4]
Heating rate—Up to 10 °C/minute[4]
Cooling rate—Up to 20 °C/minute[4]
Temperature uniformity—±1.5 °C[4]
System description—Thermal system for Summit with Thermochuck[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]microprecision.commicroprecision.com