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0010-22161 High EFF RF MatchversusDAG 810 Ring Removal

Applied Materials 0010-22161 High EFF RF Match, Disco DAG 810 Ring Removal, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsDisco
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FamilyApplied Materials 0010-22161 High EFF RF MatchDisco DAG 810
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Convertible to 8"[3]
Supported workpiece size—Up to Φ8 inch (Φ4, 5, 6, 8 inch with universal chuck table)[4]
Grinding method—Anomalous in-feed grinding with wafer rotation[4]
Grinding wheel diameter—Φ200 mm[4]
Spindle rated output—4.2 kW[4]
Spindle rated torque—5.9 N·m[4]
Spindle rotation speed range—1,000 – 7,000 min⁻¹[4]
Equipment dimensions (W × D × H)—600 × 1,700 × 1,780 mm[4]
Equipment weight—Approx. 1,300 kg[4]
Wafer size (ring removal variant)—6 inch (convertible to 8 inch)[3]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]disco.com.sgdisco.com.sg