Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusSEC-600/SE-600

Applied Materials 0010-22161 High EFF RF Match, CHA SEC-600/SE-600, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsCHA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle—Legacy
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchCHA SEC-600/SE-600
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Product group—Legacy systems[3]
Equipment family—Vacuum deposition systems[3]
product category—Legacy systems[3]
equipment type—Vacuum deposition system[3]
offering types—Sputtering, evaporation, and coater systems[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]chaindustries.comchaindustries.com