Comparison ledger
Applied Materials 0010-21246 Part, SUSS MicroTec AS 8 Alta Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | AS 8 Alta SpraySUSS MicroTec |
|---|---|---|
| OEM | Applied Materials | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | SUSS MicroTec AS 8 |
| Specifications | ||
| Configuration | — | With:[1] |
| Tool type | — | Manual spray coater for high topographies[2] |
| Substrate size | — | Up to 200 mm and square substrates up to 6 inch edge length[2] |
| Wafer sizes | — | 3, 4, 5, 6, 8 inch[1] |
| Spray coater description | — | Spray coater for 3-inch to 8-inch wafers[3] |
| Maximum substrate size | — | 8 inch[4] |
| Resist spray dispense system | — | High precision resist spray dispense system up to 30 CPS, Resist type[1] |
| Pre-wet dispense nozzle | — | Altaspray, bowl clean solvent type[1] |
| Pressure tank system | — | 10 L SS with coupling[1] |
| Substrate assembly | — | R6 Altaspray BSR ready[1] |
| Resist storage | — | Stainless steel (x2)[1] |
| Media storage | — | SS EX[1] |
| Waste canister | — | 10 L stainless steel[1] |
| Transformer | — | For manual tool[1] |
| Vintage | — | 2018[1] |
| Spray axis velocity | — | Up to 500 mm/s[2] |
| Acceleration | — | Up to 9 m/s²[2] |
| Z-axis adjustment range | — | Up to 45 mm[2] |
| Nozzle adjustment range | — | 67.5 mm to 107.5 mm[2] |
| Chuck rotation | — | Up to 1,000 rpm[2] |
| Nozzles | — | Dual spray nozzles and separate solvent nozzle[2] |
| Filter unit | — | Solvent[1] |
| Maximum rotation speed | — | Up to 1,000 rpm[2] |
| Manual | — | 2018[1] |