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0010-18024 Pyrometer AssemblyversusNewview 5000 Optical

Applied Materials 0010-18024 Pyrometer Assembly, Zygo Newview 5000 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsZygo
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyZygo Newview
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Windows NT[2]
Lens—x50[2]
Motorized Stage—X, Y Only[2]
Instrument type—Optical profilometer[2]
Measurement type—Non-contact 3D surface profiler[3]
Measurement technique—Scanning white light interferometry[3]
Stage—Motorized X/Y stage[2]
Control system—Windows NT[2]
Objectives—5x, 10x, 50x[3]
Vertical resolution—0.1-20nm[3]
Lateral resolution range—0.64–2.6μm[3]
Maximum vertical step height—5mm[3]
Vertical scan rate—≤ 10μm/sec[3]
Sample types—Opaque and transparent surfaces[3]
Maximum roughness—≤ 100μm Rp[3]
Reflectivity—4-100%[3]
Maximum sample thickness—104mm[3]
Working distance at 5x objective—9.3mm[4]
Working distance at 10x objective—7.4mm[4]
Working distance at 50x objective—3.4mm[4]
Extended scan length—Up to 5000um[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu
  4. [4]ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu