Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan SP 1 Unpatterned Wafer Inspector, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | KLA Surfscan SP 1 Unpatterned Wafer Inspector |
| Cited variants | — | |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[4] | — |
| Substrate Supported Sizes | — | 300 mm, 200 mm, 150 mm (vacuum handling); 300 mm or 200 mm only for Edge Handling and BSIM configurations[1] |
| Defect Sensitivity (frontside, polished bare Si, >95% capture rate) | — | >0.083 µm diameter PSL sphere equivalent with normal illumination; >0.060 µm with oblique illumination[1] |
| Defect Sensitivity (SP1 DLS variant) | — | 0.050 µm defect sensitivity on polished bare silicon[2] |
| Laser Source (SP1 DLS) | — | Argon Ion Laser (488 nm)[2] |
| Throughput (200 mm, Vacuum Handling) | — | 125 wph (Frontside, @0.08 µm HT); 40 wph (Frontside, @0.06 µm HS)[1] |
| Throughput (300 mm, Vacuum Handling) | — | 90 wph (Frontside, @0.08 µm HT); 22 wph (Frontside, @0.06 µm HS)[1] |
| Dimensions (Standard Handler) | — | Height: 183 cm (72"); Width: 117 cm (46"); Depth: 122 cm (48")[1] |
| Weight (Instrument) | — | ~360 kg (800 lb)[1] |
| Operating System | — | Windows NT 4.0[1] |
| System Power Rating (SP1 TB1) | — | 240 VAC, Single Phase[1] |
| Contamination (Frontside) | — | ≤0.001 particles (≥0.09 µm)/cm²/pass[1] |
| Supported Substrate Sizes | — | 150mm, 200mm, 300mm (vacuum handling); 300mm or 200mm only for Edge Handling and BSIM configurations[1] |
| Laser Source | — | Argon Ion Laser (488 nm)[5] |
| System Power Rating | — | 240 VAC, Single Phase[1] |
| Throughput (200mm, Vacuum Handling, Frontside) | — | 125 wph @0.08 µm HT; 40 wph @0.06 µm HS[1] |
| Throughput (300mm, Vacuum Handling, Frontside) | — | 90 wph @0.08 µm HT; 22 wph @0.06 µm HS[1] |
| Dimensions | — | Height: 183 cm (72"); Width: 117 cm (46"); Depth: 122 cm (48")[1] |
| Weight | — | ~360 kg (800 lb)[1] |
| Contamination | — | ≤0.001 particles (≥0.09 µm)/cm²/pass frontside[1] |
| Software Version | — | 3.5[1] |
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