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0010-18024 Pyrometer AssemblyversusNB 5000 Dual Beam FIB-SEM

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi NB 5000 Dual Beam FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi NB 5000 Dual Beam FIB-SEM
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Premium System[2]
Power—8kVA[3]
Frequency—50/60 Hz[3]
Input voltage—200 / 208 / 230 Vac[3]
SEM resolution—1.0nm @ 15Kv[2]
FIB resolution—5nm @ 40Kv[2]
FIB column beam range—1Kv - 40Kv[2]
FIB column beam current—>50nA max beam current (operable)[2]
SEM column beam range—0.5Kv - 30Kv[2]
SEM electron gun—ZrO/W Schottky emission electron gun[2]
SEM column beam current—>30nA max beam current[2]
Pattern generator—4K X 4K Pattern Generator System[2]
Image memory—2560 X 1920[2]
Display—Dual Monitor Simultaneous Display[2]
Vacuum system—Turbo Molecular Pump; Dry Pump (250 I/s @60hz); Ion source chamber Ion pump (20 I/s); Getter Pump (100 l/s); Electron gun chamber Ion pump (30 l/s); Intermediate chamber Ion pump (30 l/s)[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com