Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Bruker InSight 3 DAFM Photomask Atomic Force, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Bruker |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Bruker InSight 3 DAFM Photomask Atomic Force |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | CD performance:[2] |
| Static accuracy | — | 3σ (%) < 1.1%[2] |
| Dynamic accuracy | — | 1.2nm (3σ)[2] |
| Throughput (9 sites) | — | 14 wph[2] |
| Max scan size | — | 49X49μm[2] |
| Noise | — | 0.1nm RMS[2] |
| Phase | — | 1 Phase[3] |
| CD Static Accuracy (3σ) | — | < 1.1%[2] |
| CD Dynamic Accuracy (3σ) | — | 1.2 nm[2] |
| Minimum Pattern Spacing (CD, dense) | — | 40 nm[2] |
| Depth Static Accuracy (3σ) | — | < 0.4%[2] |
| Depth Dynamic Accuracy (3σ) | — | 0.5 nm[2] |
| Minimum Pattern Spacing (Depth, dense) | — | 30 nm[2] |
| Maximum Scan Size | — | 49×49 μm[2] |
| Power Phase | — | 1 Phase[3] |
| Power Wire | — | 3 Wire[3] |
| Power Frequency | — | 50/60 Hz[3] |
| Power Voltage | — | 208-230 V[3] |
| Peak kVA | — | 2.8[3] |
| Average kVA | — | 2.0[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →