Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Tokyo Electron TE 8401 Poly, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | TE 8401 PolyTokyo Electron |
|---|---|---|
| OEM | Applied Materials | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Tokyo Electron TE 8401 |
| Cited variants | — | |
| Specifications | ||
| OEM | Applied Materials[2] | — |
| Model | 0010-16392[2] | TE 8401 Poly[4] |
| Type | ESC Assembly[2] | — |
| Wafer Size | 300 mm[3] | — |
| Electrode Configuration | Dual[3] | — |
| Configuration | — | Single chamber[4] |
| LD | — | 2 each[4] |
| Gas | — | He, O2, CF4, HBr, CL2[4] |
| OS | — | EPROM based system[4] |
| Manufacturer | — | Tokyo Electron[4] |
| Pumps | — | 2[4] |
| Gas delivery | — | He, O2, CF4, HBr, CL2[4] |
| Vintage | — | 1998[4] |
| Wafer size | — | 8-inch wafers[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →