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Comparison ledger

0010-16392 ESC AssemblyversusCentura DPS+

Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura DPS+, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
Centura DPS+Applied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyApplied Materials Centura
Cited variants—
Specifications
OEMApplied Materials[2]—
Model0010-16392[2]—
TypeESC Assembly[2]—
Wafer Size300 mm[3]—
Electrode ConfigurationDual[3]—
Configuration—Metal 2ch, ASP+ 2ch[4]
Wafer size—8 inch[4]
Vintage year—2000[4]
Chamber types—DPS+ ES DTCU and HR DTCU[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]spwindustrial.comspwindustrial.com
  4. [4]inventory listing
  5. [5]inventory listing