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Comparison ledger

0010-14300 Magnet AssyversusNV GSD HE

Applied Materials 0010-14300 Magnet Assy, Sumitomo NV GSD HE, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
NV GSD HESumitomo
OEMApplied MaterialsSumitomo
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssySumitomo NV GSD HE
Specifications
ConfigurationP4 Magnet Assy, IMP[1]Disk Type:[2]
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Wafer Titlt Function—α + β ≤ ±11° adjustable[2]
Manufacturer—Sumitomo[2]
Model—NV GSD HE[2]
Category—Ion Implantation[3]
Wafer size—6 inch[2]
Wafer handling—17 wafers[3]
Wafer tilt function—α + β ≤ ±11° adjustable[2]
Disk type—Full Disk; AL Solid Disk; 150 mm[2]
Available gas types—Ar (external supply); BF3 (SDS3 4X); Xe (3.4 L)[2]
Maximum injection energy—3,000 keV (varies depending on ion species)[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com